NIKON L300/200N Seriers

Enhanced observation, durability and operational performance, combined with improved functionality between the microscope and digital cameras provide ideal imaging

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Enhanced observational performance

Epi-fluorescence observation widens inspection range (L300N/L300ND/L200ND only)

  • The L300N/L300ND/L200ND is capable of Diascopic illumination and provides various observation methods such as brightfield, darkfield, simple polarizing and DIC. It also employs Epi-fluorescence observation, including 365 nm UV excitation.
  • Highly beneficial in inspection of semiconductor resist residues and organic electroluminescence displays

Objective lens: CFI60-2 TU Plan Fluor 10x

Brightfield observation of wafer pattern
Darkfield observation
DIC observation
Epi-fluorescence observation of organic substance on wafer

Motorized mercury fiber illuminator Intensilight for Epi-fluorescence observation (L300N/L300ND/L200ND only)

  • A motorized mercury precentered fiber illuminator is employed.
  • Lamp centering and focus adjustment are not necessary, even after lamp replacement.
  • The light source can be placed away from the microscope, reducing heat near the microscope and preventing defocusing.
  • Variable light intensity and shutter control provide excellent flexibility.
  • The lamp has an average lifespan of 2000 hours.

Four times brighter than conventional Diascopic observation (L300ND only)

  • The L300ND employs a new light source and advanced optics to provide four times brighter illumination for Diascopic observation.

CFI60-2 optics offer long working distance and high NA

  • Nikon’s original CFI60-2 optics offer both image brightness through high NA and wider sample range and access with long WD.
  • Provides clear, high-contrast brightfield images by minimizing flare.
  • The “fly-eye” lens array, which provides uniform illumination throughout the visual field, is employed for darkfield illumination optics, allowing remarkably bright, high-resolution darkfield images.
From left, CFI60-2 objective, CF & IC objective
Fly-eye lens

Enhanced environmental consideration and operation

High-intensity 12V-50W halogen illuminator is brighter than that of a standard 12V-100W illuminator

  • Employs the LV-LH50PC precentered lamphouse, which offers greater brightness than that of a 12V-100W illuminator at half the power consumption.
  • Incorporating a lamphouse rear mirror and optimizing the size of the lamp filament allows effective and uniform illumination on the pupil plane, critical in an optical system. Objectives with a magnification of 50x or higher benefit from an increased brightness of 20 percent compared to the standard 12V-100W illuminator.
  • Features environmentally-friendly design and reduces thermal induced defocus.

The motorized universal nosepiece is three times more durable than conventional models

  • Up to six objectives can be mounted.
  • Centering mechanism is possible at three nosepiece positions (L300N/L300ND only).
  • Even with high magnification, improved centricity minimizes image shifting when the objective is changed. This enables stable observations from high to low magnification.
  • To protect the operator’s eye, an anti-flash mechanism engages when the nosepiece is rotated.

Antistatic coatings for stronger safeguards against contamination

  • Antistatic coatings have been applied to the body, stage, eyepiece tube and other various controls. These coatings strengthen safeguards against contamination and help prevent damage to samples caused by electrostatic charges, thus contributing to higher yields.

Tilting trinocular eyepiece tube for observation at optimum eyepoint level

  • Ultra-wide 25-mm field of view and eyepiece angle adjustment between 0 ° and 30 °
  • Allows operators to adjust eyepoint level to ensure a comfortable viewing position

Fixed-position X-Y fine movement control

  • The X-Y fine movement control is positioned close to the operator.
  • All controls are located near each other, allowing stage movements and focusing to be carried out with ease.

Target for easier focusing

  • Inserting a focusing target in the optical path allows easy and accurate focusing on low-contrast samples, such as bare wafers.

Controls located at microscope front

  • The main control knobs and buttons are located at the front of the microscope for easy access.
  • Quick and easy microscope operation while viewing samples is possible.
  • Minimizes fatigue during lengthy observations.

Antistatic coatings for stronger safeguards against contamination

  • Antistatic coatings have been applied to the body, stage, eyepiece tube and other various controls. These coatings strengthen safeguards against contamination and help prevent damage to samples caused by electrostatic charges, thus contributing to higher yields.

Improved functionality between the microscope and digital cameras

Optimized workflow observation, image capture and analysis

  • Nikon’s simultaneous development of microscopes, digital cameras and imaging software has enabled it to develop a highly functional easy-to-use digital imaging microscopy system.
  • All aspects of image flow are supported, including setup for best viewing conditions, digital image capturing, processing and analysis.
[fig.]
NIS-Elements operational panel(monitor images are simulated.)
ECLIPSE L300N
(Episcopic illumination type)
ECLIPSE L300ND
(Diascopic/Episcopic illumination type)
Main body 12V-50W halogen lamp light source built in; Power sources for motorized control built in
Motorized control for nosepiece, Light intensity control, Aperture diaphragm control
Nosepiece: Motorized universal sextuple nosepiece with nosepiece centering function
Epi/Dia changeover
Focusing mechanism Cross travel: 29 mm
Coarse: 12.7 mm per rotation (torque adjustable, refocusing mechanism provided)
Fine: 0.1 mm per rotation (in 1 µm increments)
Episcopic illuminator 12V-50W halogen lamp light source built in
Motorized aperture diaphragm (centerable), Fixed field diaphragm (with focus target)
Pinhole slider (optional), Four ø25 mm filters (NCB11, ND16, ND4), Polarizer and Analyzer can be mounted
Observation methods: Brightfield, Darkfield, Simple polarizing, DIC, Epi-fluorescence
Diascopic illuminator 12V-50W halogen lamp light source built in
Aperture diaphragm built in
LWD condenser built in
Interface USB x 1, RS232C (for Intensilight) x 1
Eyepiece tubes L2-TT2A Ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 0-30°) FOV: 22/25; Beamsplit ratio 100:0/20:80
L2-TTA Ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 0-30°) FOV: 22/25; Beamsplit ratio 100:0/0:100
LV-TI3 Trinocular eyepiece tube (erect image) FOV: 22/25; Beamsplit ratio 100:0/0:100
Eyepieces CFI eyepiece lens series
Objectives CFI LU/L Plan series
Stages 14 x 12 stage, stroke: 354 x 302 mm (Diascopic observation range: 354 x 268 mm)
Coarse/Fine-movement changeover possible
Fixed-position X-Y fine-movement controls
Antistatic mechanism 1000-10 V, within 0.2 sec
Power consumption 1.2 A/90 W
Dimensions Approx. 360 (W) x 951 (D) x 581 (H) mm (at tilt angle 10°)
Weight Approx. 64 kg (When L2-S8A 8 x 8 stage and L2-TTA eyepiece tube are used)
ECLIPSE L200N
(Episcopic illumination type)
ECLIPSE L200ND
(Diascopic/Episcopic illumination type)
Main body 12V-50W halogen lamp light source built in; power sources for motorized control built in
Motorized control for nosepiece, light intensity control, aperture diaphragm control
Nosepiece: Motorized universal sextuple nosepiece
Epi/Dia changeover
Focusing mechanism Cross travel: 29 mm
Coarse: 12.7 mm per rotation (torque adjustable, refocusing mechanism provided)
Fine: 0.1 mm per rotation (in 1 µm increments)
Episcopic illuminator 12V-50W halogen lamp light source built in
Motorized aperture diaphragm (centerable), Fixed field diaphragm (with focus target)
Pinhole slider (optional), Four ø25 mm filters (NCB11, ND16, ND4), Polarizer and Analyzer can be mounted
Diascopic illuminator 12V-50W halogen lamp light source built in
Aperture diaphragm built in
LWD condenser built in
Interface USB x 1, RS232C (for Intensilight) x 1
Eyepiece tubes L2-TT2A ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 0-30 °) FOV: 22/25; Beamsplit ratio 100:0/20:80
L2-TTA ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 0-30 °) FOV: 22/25; Beamsplit ratio 100:0/0:100
LV-TI3 Trinocular (erect image, FOV: 22/25)
Eyepieces CFI eyepiece lens series
Objectives CFI LU/L Plan series
Stages L2-S8A 8 x 8 stage, stroke: 205 x 205 mm (diascopic observation range: 150 x 150 mm)
Coarse/Fine-movement changeover possible
Fixed-position X-Y fine-movement controls
Antistatic mechanism 1000-10 V, within 0.2 sec
Power consumption 1.2 A/90 W
Dimensions Approx. 360 (W) x 860 (D) x 580 (H) mm (at tilt angle 10 °)
Weight Approx. 45 kg (When L2-S8A 8 x 8 stage and L2-TTA eyepiece tube are used)

https://www.nikon.com/products/industrial-metrology/support/download/brochures/pdf/2ce-khdh-4.pdf