MM-400/800 Series

MM-400/800 series incorporate key performance features expected in an advanced measuring microscope:

Greater Accuracy
Digital Imaging and Vision Processing Metrology
Larger Stage for Increased Sample Handling
Non-Contact Z-height Measurements
Coordination with Data Processing Systems DP-E1A

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10 Main Bodies available for different applications

For Large Stroke Stage (Max, 300mm x 200mm x 200mm)

MM-800/LM: Motorized Z Axis
MM-800/L: Built-in Z Linear Scale
MM-800: 2-Axis Measurement Model
MM-800/S: For 3rd Party DRO
MM-800/SL: For 3rd Party DRO with Built-in Z Linear Scale

For Smaller Stroke Stage (Max, 150mm x 100mm x 150mm)

MM-400/LM: Motorized Z Axis
MM-400/L: Built-in Z Linear Scale
MM-400: 2-Axis Measurement Model
MM-400/S: For 3rd Party DRO
MM-400/SL: For 3rd Party DRO with Built-in Z Linear Scale

Features

300mm x 200mm Stage

Added body strength enables the use of larger stages, such as the PS12x8C stage, allowing for larger workpieces.

MM Controller Backpack Interface

Illumination, X/Y stage, and Z data can be connected to the MM Controller as an interface to an external computer running E-Max software for data processing and system control.

All White LED Illuminators

[fig.] — High-intensity white LED illuminator is provided as standard for brightfield use. This illuminator features no bulb replacement and constant color temperature, enabling measurement with high-precision and efficiency.

Focusing Aid (FA)

Delivers sharp patterns to allow accurate focusing during Z-axis measurements.Measurement errors due to differences in the depth of focus of different objectives are minimized.

Applications

Semiconductor packages, Bonding placement, Loop height, FPD panel (LCM) MEMS, Wafer level CSP, HDD sliders

Accessories for Measuring Microscope

Protractor Eyepieces

Digital Protractor Eyepiece^*

Rotate the crosshairs in the viewfield to measure the angle.
Display unit: 1 minute, 10 minutes

*Not available for S and SL models

1-Minute Reading Eyepiece (for all measuring microscopes except those with universal illumination)

Viewfield includes crosshairs and 60°c lines, and angle indexes are read by appropriate microscopes. Measuring range is 360°.

10-Minute Reading Eyepiece (for all measuring microscopes except those with universal illumination)

Viewfield includes crosshairs and angle indexes. When the knurled ring at the lower section of the eyepiece tube is turned, the crosshairs and the vernier both rotate up to 180°.

Note:Monocular adapter (standard equipment) is required when using these eyepieces with trinocular tubes.

Objectives

These compact objectives feature long working distances and excellent resolution. All have almost the same parfocal distances and come with lens adapter for quick and easy replacement.

*3x objective is standard with the microscope

Magnification	1X	3X	5X	10X	20X	50X	100X
Working distance (mm)	79	75	64	48	20	15	4

Templates

Dedicated template used for performing the comparison and measuring of profiles. The following dedicated templates are available to facilitate profile comparison and measurements.

Standard angle template (standard equipment)
Concentric: diameter 0.2-4.6^*

Note: Designed for 3x objectives
*Cannot be attached to monocular type Templates

DP-E1A

Effectively used in combination with a measuring microscope, the DP-E1A quickly calculates geometrical features with simple and interactive operations. Measurement results are automatically memorized as teaching steps and can be easily used as a measurement routine.

Data Processing Software E-Max Series

Combined with the V2 digital camera, E-MAX series software provides various advanced measurements and processing functions, ranging from 2D data processing and image measurement, to data storage. Automated edge detection with sub-pixel processing enables more precise and repeatable measurement.

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MM-400/800 Series

10 Main Bodies available for different applications