10 Main Bodies available for different applications
- For Large Stroke Stage (Max, 300mm x 200mm x 200mm)
-
- MM-800/LM: Motorized Z Axis
- MM-800/L: Built-in Z Linear Scale
- MM-800: 2-Axis Measurement Model
- MM-800/S: For 3rd Party DRO
- MM-800/SL: For 3rd Party DRO with Built-in Z Linear Scale
- For Smaller Stroke Stage (Max, 150mm x 100mm x 150mm)
-
- MM-400/LM: Motorized Z Axis
- MM-400/L: Built-in Z Linear Scale
- MM-400: 2-Axis Measurement Model
- MM-400/S: For 3rd Party DRO
- MM-400/SL: For 3rd Party DRO with Built-in Z Linear Scale
Features
300mm x 200mm Stage

MM Controller Backpack Interface

All White LED Illuminators
![[fig.]](https://www.nikon.com/products/industrial-metrology/lineup/measuring_instruments/measuring_microscope/mm-400_800/img/pic_04.jpg)
Focusing Aid (FA)
Delivers sharp patterns to allow accurate focusing during Z-axis measurements.Measurement errors due to differences in the depth of focus of different objectives are minimized.
![[fig.]](https://www.nikon.com/products/industrial-metrology/lineup/measuring_instruments/measuring_microscope/mm-400_800/img/pic_06.jpg)
![[fig.]](https://www.nikon.com/products/industrial-metrology/lineup/measuring_instruments/measuring_microscope/mm-400_800/img/pic_07.jpg)
![[fig.]](https://www.nikon.com/products/industrial-metrology/lineup/measuring_instruments/measuring_microscope/mm-400_800/img/pic_08.jpg)
Applications
Semiconductor packages, Bonding placement, Loop height, FPD panel (LCM) MEMS, Wafer level CSP, HDD sliders
![[fig.]](https://www.nikon.com/products/industrial-metrology/lineup/measuring_instruments/measuring_microscope/mm-400_800/img/pic_10.jpg)
![[fig.]](https://www.nikon.com/products/industrial-metrology/lineup/measuring_instruments/measuring_microscope/mm-400_800/img/pic_11.jpg)
![[fig.]](https://www.nikon.com/products/industrial-metrology/lineup/measuring_instruments/measuring_microscope/mm-400_800/img/pic_12.jpg)
![[fig.]](https://www.nikon.com/products/industrial-metrology/lineup/measuring_instruments/measuring_microscope/mm-400_800/img/pic_13.jpg)
![[fig.]](https://www.nikon.com/products/industrial-metrology/lineup/measuring_instruments/measuring_microscope/mm-400_800/img/pic_14.jpg)
![[fig.]](https://www.nikon.com/products/industrial-metrology/lineup/measuring_instruments/measuring_microscope/mm-400_800/img/pic_15.jpg)
![[fig.]](https://www.nikon.com/products/industrial-metrology/lineup/measuring_instruments/measuring_microscope/mm-400_800/img/pic_16.jpg)
![[fig.]](https://www.nikon.com/products/industrial-metrology/lineup/measuring_instruments/measuring_microscope/mm-400_800/img/pic_17.jpg)
![[fig.]](https://www.nikon.com/products/industrial-metrology/lineup/measuring_instruments/measuring_microscope/mm-400_800/img/pic_18.jpg)