This measuring machine adopts an optical fiber-based laser interferometer, one of Tokyo Seimitsu's constituent technologies, and incorporates a newly developed highly stable optical path laser interferometer having a resolution of 0.31 nm.
This system features a dynamic range as well as a resolution ratio of 42,000,000:1.This means that in a single trace you can evaluate contour profiles in wide ranges and also hidden fine surfaces.
Linear Motor Drive (Patented)
Linear motor drive ensures high accuracy and high-speed movement.
Also, low vibration ensures more stable measurement at high magnifications.
Roughness and Contour Analyzed in a Single Measurement
Measurement efficiency imporved and high accuracy is maintained at the same time.
Wide measuring range of 200 mm (horizontal direction) and 13 mm (vertical direction)
Motorized tilting unit capable of tilting to 45° also available. (SURFCOM CREST-T)