NIKON NEXIV VMZ-K Series
NIKON NEXIV VMZ-K Series
Model: NEXIV VMZ-K
Brand: Nikon
Origin: JP
概括
Ground-Breaking, Multi-Functional, Confocal Video Measuring System
This measuring system incorporates confocal technology, brightfield imaging with a 15X zoom and laser auto focus. No matter what geometrical measurements are needed, whether 2D or 3D, inspection and evaluation is exceptionally fast and accurate.
Confocal optics enable a clear display and facilitate accurate detection of high contrast edges.
Product Highlights
Fine Bump and Substrate Pattern
A combination of 2D measurement with a 15x zoom brightfield image and 3D height measurement in the same field of view enables diverse measurements.
Probe Cards
Programming can be made from location data in one click. XYZ coordinates and coplanarity contact probe pins on probe cards can be automatically measured with unique image processing tools.
Precise PCB Pattern
Nikon’s unique confocal imaging technology makes it possible to accurately scan both highly reflective and low reflectivity surfaces.
| Objective Lens | |||||
| Standard Head | High-magnification Head | ||||
| Magnification | 1.5x | 3x | 7.5x | 15x | 30x |
| W.D. | 24mm | 24mm | 5mm | 20mm | 5mm |
| Confocal Optics (Area Height Measure) | |||||
| Standard Head | High-magnification Head | ||||
| Field of View | 8 x 6mm | 4 x 3mm | 1.6 x 1.2mm | 0.8 x 0.6mm | 0.4 x 0.3mm |
| Height Measurement Repeatability (2σ) | 0.6µm | 0.35µm | 0.25µm | 0.20µm | |
| Height Measurement Resolution | 0.01µm | ||||
| Brightfield Optics (2D Measurement) | |||||
| Standard Head | High-magnification Head | ||||
| Zooming Method | Motorized 5-step zoom | ||||
| Field of View | 8 x 6mm to 0.53 x 0.4mm |
4 x 3mm to 0.27 x 0.2mm |
1.6 x 1.2mm to 0.11 x 0.08mm |
1.26 x 0.95mm to 0.1 x 0.074mm |
0.63 x 0.47mm to 0.05 x 0.04mm |
| Illumination | White LED diascopic and episcopic illuminator for all types, White LED ring light for type 1.5x, 3x and 7.5x |
||||
| Light source | White LED | ||||
| Auto Focus | Vision AF and TTL laser AF (Scan Mode available) | ||||
| Main Body | ||
| VMZ-K3040 | VMZ-K6555 | |
| Stroke (X, Y, Z) | 300 x 400 x 150mm | |
| Guaranteed Loading Capacity | 20kg | 30kg |
| Maximum Permissible Error | EUX,MPE EUY, MPE 1.5 + 4L/1000µm | |
| EUXY, MPE 2.5 + 4L/1000µm | ||
| EUZ, MPE 1 + L/1000µm | ||
| Power Source / Power Consumption | AC 100 to 240 V ± 10% 50/60 Hz / 13A to 6.5A | |
| Footprint | 2500 x 1600mm | 2500 x 1900mm |
应用
Product Highlights
Fine Bump and Substrate Pattern
A combination of 2D measurement with a 15x zoom brightfield image and 3D height measurement in the same field of view enables diverse measurements.
Probe Cards
Programming can be made from location data in one click. XYZ coordinates and coplanarity contact probe pins on probe cards can be automatically measured with unique image processing tools.
Precise PCB Pattern
Nikon’s unique confocal imaging technology makes it possible to accurately scan both highly reflective and low reflectivity surfaces.
规格
| Objective Lens | |||||
| Standard Head | High-magnification Head | ||||
| Magnification | 1.5x | 3x | 7.5x | 15x | 30x |
| W.D. | 24mm | 24mm | 5mm | 20mm | 5mm |
| Confocal Optics (Area Height Measure) | |||||
| Standard Head | High-magnification Head | ||||
| Field of View | 8 x 6mm | 4 x 3mm | 1.6 x 1.2mm | 0.8 x 0.6mm | 0.4 x 0.3mm |
| Height Measurement Repeatability (2σ) | 0.6µm | 0.35µm | 0.25µm | 0.20µm | |
| Height Measurement Resolution | 0.01µm | ||||
| Brightfield Optics (2D Measurement) | |||||
| Standard Head | High-magnification Head | ||||
| Zooming Method | Motorized 5-step zoom | ||||
| Field of View | 8 x 6mm to 0.53 x 0.4mm |
4 x 3mm to 0.27 x 0.2mm |
1.6 x 1.2mm to 0.11 x 0.08mm |
1.26 x 0.95mm to 0.1 x 0.074mm |
0.63 x 0.47mm to 0.05 x 0.04mm |
| Illumination | White LED diascopic and episcopic illuminator for all types, White LED ring light for type 1.5x, 3x and 7.5x |
||||
| Light source | White LED | ||||
| Auto Focus | Vision AF and TTL laser AF (Scan Mode available) | ||||
| Main Body | ||
| VMZ-K3040 | VMZ-K6555 | |
| Stroke (X, Y, Z) | 300 x 400 x 150mm | |
| Guaranteed Loading Capacity | 20kg | 30kg |
| Maximum Permissible Error | EUX,MPE EUY, MPE 1.5 + 4L/1000µm | |
| EUXY, MPE 2.5 + 4L/1000µm | ||
| EUZ, MPE 1 + L/1000µm | ||
| Power Source / Power Consumption | AC 100 to 240 V ± 10% 50/60 Hz / 13A to 6.5A | |
| Footprint | 2500 x 1600mm | 2500 x 1900mm |
Catalogue