NIKON NEXIV VMZ-K Series

Model: NEXIV VMZ-K

Brand: Nikon

Origin: JP

概要

Ground-Breaking, Multi-Functional, Confocal Video Measuring System

This measuring system incorporates confocal technology, brightfield imaging with a 15X zoom and laser auto focus. No matter what geometrical measurements are needed, whether 2D or 3D, inspection and evaluation is exceptionally fast and accurate.

Confocal optics enable a clear display and facilitate accurate detection of high contrast edges.

Product Highlights

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Fine Bump and Substrate Pattern

A combination of 2D measurement with a 15x zoom brightfield image and 3D height measurement in the same field of view enables diverse measurements.

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Probe Cards

Programming can be made from location data in one click. XYZ coordinates and coplanarity contact probe pins on probe cards can be automatically measured with unique image processing tools.

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Precise PCB Pattern

Nikon’s unique confocal imaging technology makes it possible to accurately scan both highly reflective and low reflectivity surfaces.

Objective Lens
	Standard Head			High-magnification Head
Magnification	1.5x	3x	7.5x	15x	30x
W.D.	24mm	24mm	5mm	20mm	5mm

Confocal Optics (Area Height Measure)
	Standard Head			High-magnification Head
Field of View	8 x 6mm	4 x 3mm	1.6 x 1.2mm	0.8 x 0.6mm	0.4 x 0.3mm
Height Measurement Repeatability (2σ)	0.6µm	0.35µm	0.25µm		0.20µm
Height Measurement Resolution	0.01µm

Brightfield Optics (2D Measurement)
	Standard Head			High-magnification Head
Zooming Method	Motorized 5-step zoom
Field of View	8 x 6mm to 0.53 x 0.4mm	4 x 3mm to 0.27 x 0.2mm	1.6 x 1.2mm to 0.11 x 0.08mm	1.26 x 0.95mm to 0.1 x 0.074mm	0.63 x 0.47mm to 0.05 x 0.04mm
Illumination	White LED diascopic and episcopic illuminator for all types, White LED ring light for type 1.5x, 3x and 7.5x
Light source	White LED
Auto Focus	Vision AF and TTL laser AF (Scan Mode available)

Main Body
	VMZ-K3040	VMZ-K6555
Stroke (X, Y, Z)	300 x 400 x 150mm
Guaranteed Loading Capacity	20kg	30kg
Maximum Permissible Error	EUX,MPE EUY, MPE 1.5 + 4L/1000µm
	EUXY, MPE 2.5 + 4L/1000µm
	EUZ, MPE 1 + L/1000µm
Power Source / Power Consumption	AC 100 to 240 V ± 10% 50/60 Hz / 13A to 6.5A
Footprint	2500 x 1600mm	2500 x 1900mm